Author Affiliations
Abstract
1 School of Science, Shandong Jianzhu University, Jinan 250101, China
2 Shandong Key Laboratory of Optical Communication Science and Technology, School of Physical Science and Information Technology, Liaocheng University, Liaocheng 252059, China
3 Shandong Provincial Engineering and Technical Center of Light Manipulations & Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250014, China
4 School of Physics, Shandong University, Jinan 250100, China
Lithium niobate (LiNbO3, LN) channel and ridge waveguides have been successfully fabricated by He ion implantation, which has energy of 500 keV and fluence of 1.5×1016 ions/cm2 and is combined with lithography and the precise diamond dicing technique. The refractive index profile of the annealed LN planar waveguide was reconstructed. The propagation loss of the channel waveguide with a width of 10 µm and that of the ridge waveguides with widths of 25 µm and 15 µm were investigated by the end-face coupling method. In our work, the factors that affect the waveguide properties of channel and ridge waveguides were revealed.
lithium niobate waveguides ion implantation ridge waveguide channel waveguide 
Chinese Optics Letters
2022, 20(7): 071301
Author Affiliations
Abstract
1 School of Science, Shandong Jianzhu University, Jinan 250101, China
2 Shandong Provincial Engineering and Technical Center of Light Manipulations & Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250014, China
3 School of Physics, Shandong University, Jinan 250100, China
We report on the fabrication and optimization of lithium niobate planar and ridge waveguides at the wavelength of 633 nm. To obtain a planar waveguide, oxygen ions with an energy of 3.0 MeV and a fluence of 1.5×1015 ions/cm2 are implanted in the polished face of LiNbO3 crystals. For planar waveguides, a loss of 0.5 dB/cm is obtained after annealing at 300°C for 30 min. The ridge waveguide is fabricated by the diamond blade dicing method on optimized planar waveguides. The guiding properties are investigated by prism coupling and end-face coupling methods.
lithium niobate waveguide precise dicing 
Chinese Optics Letters
2021, 19(6): 060009
作者单位
摘要
1 北京理工大学光电学院, 北京 100081
2 北京理工大学激光微纳制造研究所, 北京 100081
设计了一种基于飞秒激光加工的无膜式光纤气体压力传感器。通过熔接形成了单模光纤-空心光纤-无芯光纤(NCF)结构,熔接结构中的两个熔接面作为反射面,构成一个低精细度的外腔式法布里-珀罗干涉仪(EFPI)。利用飞秒激光加工结构中的空心光纤部分,烧蚀出一个与外界环境连通的小孔。外界气体压力的变化引起EFPI腔中气体折射率发生变化,通过测量法布里-珀罗腔的光学腔长,得到对应的外界气体压力。实验结果表明,传感器在0~5 MPa压力范围内的腔长-压力灵敏度为1.02 μm/MPa,传感器的压力分辨率为2.4 kPa。该压力传感器具有量程大、灵敏度高、分辨率高和线性度高等优点。
光纤光学 压力传感器 外腔式法布里-珀罗干涉仪 飞秒激光加工 
激光与光电子学进展
2019, 56(10): 100601
Author Affiliations
Abstract
1 Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
2 Vibration and Noise Control Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
3 School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
We propose a temperature-insensitive refractive index (RI) fiber sensor based on a Mach–Zehnder interferometer. The sensor with high sensitivity and a robust structure is fabricated by splicing a short photonic crystal fiber (PCF) between two single-mode fibers, where two microcavities are formed at both junctions because of the collapse of the PCF air holes. The microcavity with a larger equatorial dimension can excite higher-order cladding modes, so the sensor presents a high RI sensitivity, which can reach 244.16 nm/RIU in the RI range of 1.333–1.3778. Meanwhile it has a low temperature sensitivity of 0.005 nm/°C in the range of 33°C–360°C.
060.2280 Fiber design and fabrication 060.2370 Fiber optics sensors 
Chinese Optics Letters
2017, 15(2): 020603
作者单位
摘要
1 北京理工大学 光电学院,  北京100081
2 北京理工大学 激光微纳制造研究所,  北京 100081
3 中自高科(苏州)光电有限公司,  苏州 215000
报道了一种基于飞秒激光加工的微纳高温振动传感器。通过熔接形成单模光纤-空芯光纤-单模光纤的结构, 利用单模光纤和空芯光纤在熔接面形成的菲涅尔反射, 构成外腔式法布里-珀罗干涉仪(EFPI)。用飞秒激光烧蚀空芯光纤, 形成悬臂梁结构。末端的单模光纤作为质量块, 在受到振动时带动悬臂梁振动, 使悬臂梁产生微弯, 进而使EFPI腔长发生变化。实验结果表明, 传感器的工作区域为20~300Hz, 在100Hz时, 0~3.01g范围内测得加速度分辨率为5×10-4g, 加速度响应灵敏度为129.6nm/g。传感器受温度影响小, 腔长的温度交叉响应仅为0.225nm/℃, 传感器可耐950℃高温冲击。
振动传感器 高温传感器 飞秒激光加工 外腔式法布里-珀罗干涉仪(EFPI) vibration sensor high-temperature sensor femtosecond laser machining extrinsic Fabry-Perot interferometer (EFPI) 
光学技术
2017, 43(4): 334
作者单位
摘要
1 北京理工大学 光电学院,  北京 100081
2 北京理工大学 激光微纳制造研究所,  北京 100081
3 北京首钢股份有限公司,  河北 迁安 064400
提出了一种基于飞秒激光加工技术制作的微纳光纤高温压力传感器。用飞秒激光在光纤端面加工出法珀腔, 制作出的全光纤法珀干涉型压力传感器, 从室温到1100℃范围进行了压力温度试验。在不同温度下, 压力传感器都有良好的线性输出特性, 短时间工作温度超过1100℃, 能够满足高温环境下压力测量的需求。
高温传感器 压力传感器 飞秒激光加工 外腔式光纤法珀干涉仪 high-temperature sensor pressure sensor femtosecond laser fabricating fiber optic extrinsic Fabry-Perot interferometer 
光学技术
2017, 43(1): 12
Author Affiliations
Abstract
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
An optical fiber extrinsic Fabry–Perot interferometer (EFPI) is designed and fabricated for refractive index (RI) sensing. To test the RI of liquid, the following two different methods are adopted: the wavelength tracking method and the Fourier-transform white-light interferometry (FTWLI). The sensitivities of sensors with cavity lengths of 288.1 and 358.5 μm are 702.312 nm/RIU and 396.362 μm/RIU, respectively, by the two methods. Our work provides a new kind of RI sensor with the advantages of high sensitivity, mechanical robustness, and low cross sensitivity to temperature. Also, we provide a new method to deal with gold film with a femtosecond laser.
060.2280 Fiber design and fabrication 060.2370 Fiber optics sensors 
Chinese Optics Letters
2016, 14(2): 020602
作者单位
摘要
1 北京理工大学光电学院, 北京 100081
2 北京理工大学激光微纳制造研究所, 北京 100081
3 中自高科(苏州)光电有限公司, 江苏 苏州 215000
设计了基于光纤白光干涉测量技术的折射率测量仪, 用来测量尺寸较小、形状简单的透光材料折射率。与传统折射率检测方法相比较, 光纤折射率测量仪具有设备尺寸小、测量精度高、操作简易、便于携带等优点。实验测得某种石英玻璃的折射率值为1.464, 与标准值偏差为0.02, 误差为1.4%; 测得某种普通玻璃的折射率为1.502, 与标准值偏差为0.002, 误差为0.1%; 测得K9玻璃的折射率为1.507, 与标准值偏差为0.009, 误差为0.6%。
光纤白光干涉测量技术 外腔式Fabry-Perot干涉仪(EFPI) 折射率 optical fiber white-light interferometry technolog EFPI refractive index 
光学技术
2016, 42(6): 487
作者单位
摘要
1 北京理工大学 光电学院, 北京 100081
2 北京理工大学 激光微纳制造研究所, 北京 100081
基于光纤双Mach-Zehnder干涉仪(MZI)结构对周界防护系统进行了设计研究。通过对两路经过不同延时的相同信号进行互相关运算, 实现了对振动入侵点的定位。提出了一种分段数据处理方法, 有效地提高了定位稳定性及准确性。测试结果表明, 该双Mach-Zehnder干涉仪周界防护系统可以实时对振动点进行定位, 在传感光纤长度为2km、采样率为2MHz时定位精度优于200m, 能够长时间连续稳定工作。
Mach-Zehnder干涉仪 周界防护 光纤传感器 Mach-Zehnder interferometer(MZI) perimeter protection optical fiber sensor 
光学技术
2015, 41(3): 193
作者单位
摘要
北京理工大学 机械与车辆学院激光微纳制造研究所, 北京 100081
为了提高光纤布拉格光栅(FBG)温度传感器的测温精度,提出了一种新型的光纤布拉格光栅(FBG)温度传感器的封装方法,并采用二次多项式拟合的方式标定该温度传感器.新的封装方法可以消除FBG温度传感器存在的应力交叉敏感,新的标定方式可以极大地提高光纤温度传感器的测温精度.通过对比光纤温度传感器的线性拟合和二次多项式拟合测温结果,表明这种封装方法结合二次多项式标定使得光纤温度传感器具有很好的稳定性和重复性.在0℃~80℃的温度范围内,曲线拟合度在0.9999以上,测温误差不超过0.13℃,能够满足实际工程应用的需求.
光纤光栅 温度传感器 二次多项式拟合 FBG temperature sensor quadratic polynomial fitting 
光学技术
2015, 41(1): 3

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